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用激光分子束外延技术在SrTiO3 (0 0 1)衬底上外延生长了高质量的BaTiO3 薄膜 ,薄膜的生长过程由反射式高能电子衍射仪 (RHEED)原位实时监测 ,表明薄膜具有二维层状生长模式 .薄膜的晶体结构和表面形貌分别由X射线衍射和原子力显微镜表征 ,显示该薄膜为完全c轴取向四方相晶体结构 ,其表面具有原子尺度光滑性 .采用角分辨X射线光电子谱技术 (ARXPS) ,研究了BaTiO3 薄膜表面最顶层原子种类和排列状况 .结果表明 ,BaTiO3 薄膜表面最顶层终止在TiO2 原子平面 .在此基础上 ,进一步在原子水平上探讨了BaTiO3 薄膜的层状外延生长机理 .
High-quality BaTiO3 thin films were epitaxially grown on SrTiO3 (001) substrate by laser molecular beam epitaxy. The growth of thin films was monitored by RHEED in situ, which showed that the thin films had two-dimensional layers Like growth mode.The crystal structure and surface morphology of the films were characterized by X-ray diffraction and atomic force microscopy, respectively.The results show that the film is a fully c-axis oriented tetragonal crystal structure with atom-scale smoothness on the surface.The angular resolution X-ray photoelectron spectroscopy (ARXPS) was used to investigate the species and arrangement of the topmost atoms on the surface of BaTiO3 thin films. The results show that the topmost layer of BaTiO3 thin films terminates in the plane of TiO2 atoms. On this basis, the layered epitaxial growth of BaTiO3 thin films Growth mechanism.