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本文利用真空还原V2 O5的方法制备出优质对VO2 薄膜 ;研究了不同真空还原时间VO2 薄膜热致相变过程中光电性能的影响 ;利用XPS、XRD对薄膜的化学状态和结晶状态进行了研究。制备的薄膜高 /低温电阻变化最大达到三个数量级 ,90 0nm处的光学透过率在相变前后改变了 40 %左右 ,热致相变性能优良。讨论了不同的真空还原时间下VO2 薄膜热滞回线的宽度、相变温度点以及高低温光透射性能。最后给出了最佳真空还原时间。
In this paper, VO2 thin films were prepared by vacuum reduction of V2 O5. The effects of different VO2 thin films on the photocatalytic properties were investigated. The chemical and crystalline states of the thin films were investigated by XPS and XRD. The maximum / minimum temperature change of the prepared films reaches up to three orders of magnitude, and the optical transmittance at 90 0 nm changes by about 40% before and after the phase change, resulting in excellent thermal induced phase transformation. The width, phase transition temperature, and high and low temperature light transmittance of the thermal hysteresis loop of VO2 thin films under different vacuum reduction time are discussed. Finally, the best vacuum recovery time is given.