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根据全反射相变理论设计了菲涅耳菱体型相位延迟器延迟量对入射角变化不敏感的结构角。根据薄膜的偏振效应,从薄膜的特征矩阵出发,通过在菱体的两个全反射面蒸镀光学介质膜的方法拓宽了菲涅耳菱体型相位延迟的消色差宽度。在ML_EB900型镀膜机上适当控制沉积条件制备了消色差相位延迟膜,实验测试结果表明:在530~700 nm的波长范围内,可以获得90°的相位延迟量,且最大偏差小于0.7°。
Based on the theory of total reflection phase transition, the structural angle insensitive to the change of incidence angle was designed for the retardation of the Fresnel rhombic phase retarder. According to the polarization effect of the thin film, the achromatic width of the Fresnel rhombic phase retardation is broadened by vapor deposition of the optical dielectric film on the two total internal reflection surfaces of the rhomboid from the characteristic matrix of the thin film. An achromatic phase retardation film was prepared by controlling the deposition conditions on ML_EB900 coating machine. The experimental results show that the phase retardation of 90 ° can be obtained in the wavelength range from 530 nm to 700 nm, and the maximum deviation is less than 0.7 °.