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纳米孔是目前单分子测序的一项重要技术。作者以氮化硅绝缘材料为基底,采用微加工技术设计和制备了自支撑氮化硅悬空膜结构,然后利用聚焦离子束刻蚀悬空膜。通过优化聚焦离子束的系统参数,得到一系列孔径和锥度可控的纳米孔。通过扫描电镜和电学信号显示,该纳米孔具有很好的表面特性和伏安特性。当加入DNA分子时,电流瞬时下降,得到一系列明显、稳定的阻塞信号。说明该方法制备的纳米孔稳定可靠,可以用于不同生物分子的检测和分析。
Nanopores are currently an important technique for single-molecule sequencing. Based on the silicon nitride insulating material, the authors design and fabricate the self-supporting silicon nitride vacant film structure by micro-fabrication technology, and then use the focused ion beam to etch the vacant film. By optimizing the system parameters of the focused ion beam, a series of nanopores with controlled pore size and taper can be obtained. Scanning electron microscopy and electrical signal show that the nanopore has good surface properties and volt-ampere characteristics. As DNA molecules were added, the current dropped instantly, giving a clear, steady block of signals. The nanopore prepared by this method is stable and reliable, which can be used for the detection and analysis of different biomolecules.