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为了满足天文望远镜自适应光学系统的需要,研制了一个961单元的变形镜及其控制系统。利用Zygo激光干涉仪对变形镜的性能进行测试,包括单个促动器的响应测试、相邻促动器间推拉测试、耦合测试;对于变形镜的校正能力,分别进行了Waffle模式测试、Zernike多项式拟合和展平测试。测试表明,961单元变形镜在单个促动器作用下的最大面形校正量为±2.5μm;相邻促动器间推拉变形量为4μm;相邻促动器间的耦合为23%;相对于之前的137单元变形镜,其对Zernike多项式的拟合能力有较大地提高;展平后的面形优于λ/70(λ=632.8nm)。测试结果达到了天文望远镜自适应光学系统对变形镜的性能指标要求。
In order to meet the needs of astronomical telescope adaptive optics, a 961-unit deformable mirror and its control system were developed. The performance of deformable mirror was tested by Zygo laser interferometer, including single actuator response test, adjacent actuator push-pull test and coupling test. For the correction ability of deformable mirror, Waffle mode test, Zernike polynomial Fitting and flattening test. The results show that the maximum surface area correction of the deformer 961 is ± 2.5μm with a single actuator and the push-pull deformation is 4μm between adjacent actuators. The coupling between adjacent actuators is 23% In the previous 137 unit deformable mirror, its fitting ability of Zernike polynomial greatly improved; flattened surface shape better than λ / 70 (λ = 632.8nm). The test results meet the astronomical telescope adaptive optical system requirements of the deformable mirror performance requirements.