The synthesis and characterization of PEG-like macromolecular structures on Nit inol surface from tri (ethylene glycol) dimethyl-ether under ECR-cold-plasma conditions were discussed. It was demonstrated that based on high-resolution ES CA, ATR-FTIR and contact angle investigations, the deposited PEG-like layers a re composed mainly of -CH 2-CH 2-O- linkages. These structures have a relati vely low contact angle. Compared to the unmodified surfaces, the plasma-treated Nitinol surfaces are more hydrophilic. Plasma enhanced coatings of PEG-like la yers can prevent Ni ion from releasing, thereby improving the biocompatibility o f Nitinol. The synthesis and characterization of PEG-like macromolecular structures on Nit inol surface from tri (ethylene glycol) dimethyl-ether under ECR-cold-plasma conditions were discussed. It was demonstrated that based on high-resolution ES CA, ATR-FTIR and contact Compared to the unmodified surfaces, the plasma-treated Nitinol surfaces are more hydrophilic Plasma enhanced coatings of PEG-like la yers can prevent Ni ion from releasing, thereby improving the biocompatibility of Nitinol.