Experimental Verification of the Physical Model for Droplet-Particles Cleaning in Pulsed Bias Arc Io

来源 :材料科学技术：英文版 | 被引量 : 0次 | 上传用户：yjj_2323

【摘要】

：

It has been reported that application of pulsed biases in arc ion plating could effectively eliminate droplet particles.The present paper aims at experimental v

【作者】

：

YanhuiZHAO GuoqiangLIN ChuangD

【机构】

：

StateKeyLaboratoryforMaterialsModificationbyLaser,StateKeyLaboratoryforMaterialsModificationbyLaser

【出处】

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材料科学技术：英文版

【发表日期】

：

2005年3期

【关键词】

：

电弧离子电镀法脉冲偏压钛薄膜粒状粉粒 Arc ion plating Pulsed bias TiN fllm Droplet-particles

【基金项目】

：

国家自然科学基金，国家高技术研究发展计划(863计划)

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It has been reported that application of pulsed biases in arc ion plating could effectively eliminate droplet particles.The present paper aims at experimental verification of a physical model proposed previously by us which is based on particle charging a

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Experimental Verification of the Physical Model for Droplet-Particles Cleaning in Pulsed Bias Arc Io

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