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由于分子泵对氦气有较大抽速,因此在真空检漏系统中通常用分子泵作为主泵,但当检漏容器很大时需要大量分子泵。低温泵具有清洁无油、抽速大的优点,如果在检漏系统中能够采用低温泵作为主泵,可以大大减少真空泵数量。本文对以低温泵为主泵的真空检漏系统进行了实验研究,并对实验现象进行了分析。研究结果表明,低温泵可以有效提高检漏系统的工作真空度,对检漏系统的有效灵敏度影响很小,但以低温泵为主泵的检漏系统的反应时间比以分子泵为主泵的检漏系统反应时间长。
Due to the large pumping speed of helium in the molecular pump, the molecular pump is usually used as the main pump in the vacuum leak detection system, but a large number of molecular pumps are needed when the leak detection container is large. The cryogenic pump has the advantages of clean, oil-free and high pumping speed. If the cryogenic pump can be used as the main pump in the leak detection system, the number of vacuum pumps can be greatly reduced. In this paper, the cryogenic pump with the main pump vacuum leak detection system was studied, and the experimental phenomenon was analyzed. The results show that the cryogenic pump can effectively improve the working vacuum degree of the leak detection system and has little effect on the effective sensitivity of the leak detection system. However, the response time of the leak detection system with the cryogenic pump as the main pump is higher than that of the molecular pump Leak detection system long reaction time.