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在一台УВНИПА 1型双激发源等离子弧薄膜沉积装置上制取TiN Ti DLC、及其含有软金属Cu或PTFE覆盖膜的多层复合涂层。摩擦磨损试验在一台球 盘滑动磨损试验机上进行。结果表明,以TiN和DLC膜为主体的多层复合涂层具有较高的摩擦学特性,过渡金属钛层、软金属和聚四氟乙烯覆盖层可以降低摩擦系数33%～50%,对磨擦表面磨损减少90%。
TiN Ti DLC was prepared on a УВНИПА 1 dual-excitation plasma arc thin film deposition apparatus and its multi-layer composite coating with Cu or PTFE overlay of soft metal. Friction and wear tests were performed on a ball and slide wear tester. The results show that multilayer coatings with TiN and DLC films as the main component have high tribological properties. The transition metal titanium layer, soft metal and polytetrafluoroethylene coating can reduce the friction coefficient by 33% ~ 50% Surface wear reduced by 90%.