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本文介绍了一种新的湿化学成膜法－液相沉积法，对液相沉积法制备氧化物薄膜的原理、工艺流程及成膜的种类和性能进行了详细阐述，并概述了其发展和应用前景。
In this paper, a new wet chemical film-forming method, liquid-phase deposition method, is introduced in this paper. The principle, process flow and film-forming types and properties of liquid-phase deposition method are described in detail. Application prospects.