本文介绍电子能谱非破坏表面组成深度分布的分析方法.在电子能谱实验中,当改变电子发射角(即起飞角)θ时,对于小角度θ值,表面检测灵敏度(即表面和本体的信号比)增加,表面层的信号灵敏度随θ的减小而增强.分析电子谱线信号强度随起飞角θ的变化情况,就能获得样品表面组成深度分布的信息。 In this paper, the analysis of the depth distribution of the non-destructive surface composition of electron spectroscopy is introduced.In the electron spectroscopy experiment, when the angle θ of the electron emission (ie the takeoff angle) is changed, the sensitivity of the surface detection (ie surface and ontology Signal ratio) increases, the signal sensitivity of the surface layer increases with the decrease of θ.The information of the depth distribution of the surface composition of the sample can be obtained by analyzing the change of the signal intensity of the electron line with the θ of the takeoff angle.