谐振式硅微结构压力传感器以其高精度和高稳定性成为多领域测试压力时的首选传感器。本文对近三十年间国内国外对谐振式硅微结构压力传感器的相关研究进行综述,简介其原理与类别,具体分析两种不同芯体的传感器的研究概况,并对芯体不同传感器的激励方式和检测方式进行对比,分析各自的特点,最后展望谐振式硅微结构压力传感器的发展前景。 Resonant silicon microstructured pressure sensor with its high precision and high stability to become the first choice for multi-field test pressure sensor. In this paper, the recent thirty years of domestic and foreign research on the resonant silicon micro-structure pressure sensor are reviewed, the principle and classification are introduced, the research overview of the two different core sensors, and the excitation of different sensors And compared with the detection methods to analyze their own characteristics, and finally prospects of the resonant silicon microstructure pressure sensor development prospects.