选用Au和LPCVD的低应力Si Nx薄膜材料,采用MEMS技术研制了新型间隔镀金热隔离结构的薄膜镂空式非制冷红外成像焦平面阵列,并应用光学读出的方法成功地在室温(27.47℃)背景下获得了人体的热像.实验证明间隔镀金热隔离结构的引入有效抑制了热传导对变形梁温升的限制,从而大大降低了系统的噪声等效温度差(NETD),NETD达到约200mK. The low-stress Si Nx thin film materials using Au and LPCVD were selected. A new type of thin film hollow-out uncooled infrared focal plane array with gold-plated thermal isolation structure was developed by using MEMS technology. The optical readout method was used successfully at room temperature (27.47 ℃) The thermal image of the human body is obtained in the background.The experiment proves that the introduction of interval gold-plated thermal isolation structure can effectively restrain the limitation of heat conduction on the temperature rise of the deformed beam, thus greatly reducing the system noise equivalent temperature difference (NETD), reaching about 200mK.