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研究了常压下射频放电的特性.实验表明,常压下射频放电的基本过程类似于恒定电场的作用,放电伏安特性曲线与汤逊德放电曲线基本相符,但快速交变电场又给放电带来一些新的特征,显示出典型的火花放电特性.
The characteristics of RF discharge at atmospheric pressure were studied. The experiment shows that the basic process of RF discharge under atmospheric pressure is similar to that of a constant electric field. The discharge volt-ampere characteristic curve basically matches the Thomsonde discharge curve. However, the rapid alternating electric field brings some new features to the discharge, showing typical Spark discharge characteristics.