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传统机械式表面粗糙度检测仪在测量软材料工件,如橡胶、塑料、铝等工件时,易造成表面的局部变形或损伤;而测量特别硬的工件时,则易造成测头磨损。因此,近十年来,非接触式表面粗糙度检测方法在国内外得到了重视和发展。德国Perthen厂最近推出的FOCODYN就是一个代表产品。它采用激光二极管光源及微型光学元件组成的光学检测系统等构成光学测量头,对工件的轮廓粗糙度作非接触的检测,具有特色、现简介如下。八十年代,由于微型半导体激光器、微型光学元件及系统以及光电传感元件的日趋成熟,
The traditional mechanical surface roughness tester can easily cause partial deformation or damage to the surface when measuring soft material workpieces, such as rubber, plastic, aluminum, etc .; while measuring hard workpieces, it is easy to cause the head to wear. Therefore, in recent ten years, non-contact surface roughness detection methods have been valued and developed both at home and abroad. The recently introduced FOCODYN from Perthen Plant in Germany is a representative product. It uses laser diode light source and micro-optical components consisting of optical detection system to form optical measuring head, the contour of the workpiece non-contact detection of non-contact, with characteristics, are summarized below. In the 1980s, due to the growing maturity of micro-semiconductor lasers, micro-optical components and systems, and photoelectric sensing components,