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本文介绍在用SAP[3]对平场显微物镜的场曲进行测试的方法及其对进口的若干个高倍平场物镜的实测结果。SAP 为我国研制的点阵状网格光栅板,当用它作为显微镜检验用的标准样品时,可同时测定各种显微物镜的分辨率、放人率、某几种象差等的成象质量指标,特别是对平场物镜的场曲和成象清晰范围等方面能实现实时、快速、直观和定量化测定。实验结果表明,这种方法不需要在事后进行复杂的理论推算,也不要求特别的高精度仪器和专门的操作技术,仪利用显微镜本身的微调刻度即可,从而使测试结果与波测显微镜和其物镜直接联系,因此适合于生产或检验现场作即时检测、评价或记录之用。
This article describes the method of testing the field curvature of a flat field micro-objective with SAP [3] and its results with several imported high-field planar objectives. SAP developed for our lattice lattice grid grating, when used as a standard sample for microscopic examination, the determination of the resolution of a variety of microscopic objectives, the release rate, the image of certain types of aberrations Quality indicators, in particular, the flat field objective lens curvature and the imaging range can be achieved in real-time, rapid, intuitive and quantitative determination. The experimental results show that this method does not require complex theoretical calculations in the future, does not require special high-precision instruments and specialized operating techniques, the instrument can be fine-tuned using the microscope itself, so that the test results with the wave-measuring microscope and Its direct contact with the objective lens, so suitable for production or testing site for real-time testing, evaluation or recording purposes.