前言直拉硅单单晶中常用的掺杂元素有磷P、硼B、砷As、锑Sb等。众所周知N型硅单晶是采用P、As、Sb三种元素作为掺杂剂,P型硅单晶是利用元素B作为掺杂剂。随着电子工业的发展,基础材料硅在质量、品种上近几年都发 Preface Czochralski silicon commonly used doping elements are phosphorus P, boron B, arsenic As, antimony Sb and so on. It is well known that N-type single crystal silicon uses P, As and Sb as dopants, while P-type single crystal uses element B as a dopant. With the development of electronic industry, the basic material of silicon in quality, variety in recent years have made