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采用RF磁控溅射方法制备了一系列AlN／DyFeCo／glass多层磁光薄膜。扫描电镜分析表明，随着溅射DyFeCo薄膜时氩气压的增大，AlN／DyFeCo界面的粗糙程度增大。进一步的研究表明，界面粗糙程度的改变对磁光多层膜的磁光特性影响很大，界面越粗糙，矫顽力从越大，反射率R越低，而克尔角θk首先随表面粗糙程度的增大而增大，到达一极大值然后再随表面粗糙程度的增大而减小。
A series of AlN / DyFeCo / glass multilayer magneto-optical thin films were prepared by RF magnetron sputtering. Scanning electron microscopy analysis showed that the roughness of AlN / DyFeCo interface increased with the increase of argon pressure during the sputtering of DyFeCo film. Further studies have shown that the change of interface roughness has a great influence on the magneto-optical properties of the magneto-optical multilayers. The coarser the interface, the larger the coercive force, the lower the reflectance R, while the kurtosis θk is firstly affected by the surface roughness As the degree increases, it reaches a maximum and then decreases as the degree of surface roughness increases.