论文部分内容阅读
目前正在利用制作普通IC和晶体管的材料及工艺来研制把压力和形变等物理量变换成电量的Si压力传感器.以前仅用于个别测量的各种传感器,现已能复合地、系统地使用,而且与其它传感器相比,与机械部件关系密切的压力传感器也在向固体化发展.人和压力之间有密切的关系,例如,高气压和低气压,血压与健康,工厂里的油压,气压的控制等到处可见.仅从这些方面来看,对压力传感器的需要量就很大.最近,由于和微型电子计算机为主的各种计算机的配合,发现了很多新应用,所以应用范围正在逐渐扩大.
Si pressure sensors that convert physical quantities such as pressure and deformation into electricity are being developed using materials and processes for making common ICs and transistors.Various sensors that were previously used only for individual measurements are now being used synthetically and systematically and Pressure sensors, which are closely related to mechanical components, are also evolving towards solidification compared to other sensors. There is a close relationship between man and stress, such as high and low air pressure, blood pressure and health, factory pressure, air pressure Of the control, etc. Only in these respects, the pressure sensor needs a lot.Recently, due to the cooperation with the microcomputer-based computer and found a lot of new applications, so the scope of application is gradually expand.