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Two types of 1×2 multi-mode interference(MMI) splitters with splitting ratios of 85:15 and 72:28 are designed.On the basis of a numerical simulation,an optimal length of the MMI section is obtained.Subsequently,the devices are fabricated and tested.The footprints of the rectangular MMI regions are only 3×18.2 and 3×14.3(μm).The minimum excess losses are 1.4 and 1.1 dB.The results of the test on the splitting ratios are consistent with designed values.The devices can be applied in ultra-compact photonic integrated circuits to realize the “tap” function.
Two types of 1 × 2 multi-mode interference (MMI) splitters with splitting ratios of 85:15 and 72:28 are designed. On the basis of a numerical simulation, an optimal length of the MMI section is obtained. Published, the devices are fabricated and tested. The footprints of the rectangular MMI regions are only 3 × 18.2 and 3 × 14.3 (μm). The minimum excess losses are 1.4 and 1.1 dB. The results of the test on the splitting ratios are consistent with designed values. The devices can be applied in ultra-compact photonic integrated circuits to realize the “tap ” function.