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高级多层材料的直接表面和深度分布化学分析要求了解多维信息,包括同时了解元素和分子信息。用飞行时间质谱法(TOFMS)检测的脉冲式射频辉光放电(pulsed rf-GDs)可以从种类繁多的材料中直接提供化学信息,且简单快捷。另一方面,脉冲式射频辉光放电中输入功率的时间分布由于不同的离子化机理产生3个主要放电阶段(峰前,高峰平稳,峰后)。结果证明将辉光放电离子源和一个快速飞行时间质谱仪相结合能够实现在不同的脉冲阶段几乎同时获得元素和分子信息。
Direct surface and depth distribution of advanced multi-layer materials Chemical analysis requires knowledge of multidimensional information, including both elemental and molecular information. Pulsed rf-GDs, as measured by TOFMS, provide direct and simple chemical information from a wide variety of materials. On the other hand, the time distribution of the input power in pulsed RF glow discharge resulted in three main discharge phases due to different ionization mechanisms (pre-peak, peak-peak, post-peak). The results demonstrate that combining a glow discharge ion source with a fast time of flight mass spectrometer enables elemental and molecular information to be obtained almost simultaneously in different pulse phases.