斜角入射沉积法是一种制备薄膜的新颖方法,它可以用来制备渐变折射率薄膜.本文首先探讨了膜料的沉积入射角为α,薄膜柱状生长倾斜角为β时的薄膜的填充系数;之后利用drude理论,分析研究了斜角入射沉积法制备渐变折射率薄膜的折射率与薄膜的入射角和生长方向的关系. The oblique incidence deposition method is a novel method for preparing thin films, which can be used to prepare graded-refractive index thin films.Firstly, the filling coefficient of the thin films when the deposition angle of incidence of the film material is α and the tilt angle of the film columnar growth is β Then the drude theory was used to analyze the relationship between the refractive index and the incident angle and growth direction of the graded-index film prepared by oblique incidence deposition.