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在碳化钨硬质合金WC-6%Co基体上采用多弧离子镀技术制备Ti Al NC涂层,采用扫描电镜和透射电镜观察涂层的微观组织结构,采用X射线衍射仪和X射线能谱分析仪分别确定涂层的物相及其化学成分。实验结果表明:涂层表面粗糙但均匀连续,且表面出现孔隙和少量的微裂纹;涂层与基体结合较好,无分层现象出现,其沉积速率约4.5μm/h。涂层的平均化学组成为Ti(20±9 at%),Al(16±5 at%),N(39±5 at%)和C(25±10 at%),涂层由纳米晶Ti N和非晶(Ti,Al)(N,C)两物相组成。
The Ti Al NC coating was prepared by multi-arc ion plating on the WC-6% Co carbide substrate. The microstructure of the coating was observed by scanning electron microscopy and transmission electron microscopy. The X-ray diffraction The analyzer determines the coating phase and its chemical composition, respectively. The experimental results show that the surface of the coating is rough but uniform and continuous, with pores and small amount of micro-cracks on the surface. The coating and the substrate are well bonded without delamination, and the deposition rate is about 4.5μm / h. The average chemical compositions of the coatings were Ti (20 ± 9 at%), Al (16 ± 5 at%), N (39 ± 5 at%) and C (25 ± 10 at% And amorphous (Ti, Al) (N, C) two phase composition.