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采用直流磁控反应溅射法分别在Al2O3陶瓷管和Si(111)基片上制备纳米TiO2薄膜。首先将样品置于马孚炉中,分别在500℃、700℃和1100℃下进行3小时退火处理,然后利用XRD测定各退火条件下TiO2薄膜的晶粒尺寸和晶型,并对样品的气体敏感特性进行测试。实验结果表明:薄膜的结构、晶粒尺寸、晶相和气敏特性随着退火温度的不同而变化,经过500℃×3小时退火后的TiO2薄膜(锐钛矿相)对乙醇蒸汽的灵敏度最高,响应(恢复)时间为2-3s,并具有很好的选择性,其最佳工作温度为280℃左右。最后讨论了薄膜的乙醇气敏机理。
Nano-TiO2 films were prepared on Al2O3 ceramic tubes and Si (111) substrates by DC magnetron reactive sputtering. First, the sample was placed in a muffle furnace and annealed at 500 ° C, 700 ° C and 1100 ° C for 3 hours respectively. Then the grain size and the crystal form of the TiO2 film under each annealing condition were measured by XRD, and the sample gas Sensitive properties for testing. The experimental results show that the structure, grain size, crystal phase and gas sensing properties of the films vary with the annealing temperature. The TiO2 film (anatase phase) annealed at 500 ℃ for 3 hours has the highest sensitivity to ethanol vapor, Response (recovery) time is 2-3s, and has a very good selectivity, the best working temperature is about 280 ℃. Finally, the film’s ethanol gas sensing mechanism is discussed.