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Silicon photonics has attracted a great deal of interest for integrated photonics systems due to its large-scale electron-ics-photonics integration on a chip by leveraging the fabrica-tion process of the complementary-metal-oxide semiconduct-or(CMOS)foundries[1-5].Germanium-on-silicon(Ge-on-Si)waveguide photodetector(PD)is an indispensable building block of silicon photonics technology which requires high sens-itivity,large bandwidth,and low dark current.