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利用光密度曲线模型优化可写光盘的染料旋涂工艺。模型具有4个特征点和3个特征线段。特征点的位置反映了平移效应和填充效应的综合效果。特征线段的斜率反映了薄膜表面的平面度。借助模型分析旋涂工艺中的许多重要参数,从而控制盘片质量,并最终实现闭环生产控制。
Optimization of dye spin-coating process of writable optical discs using optical density curve model. The model has 4 feature points and 3 feature segments. The location of feature points reflects the combined effect of translational and filling effects. The slope of the characteristic line segment reflects the flatness of the film surface. With the help of model analysis of many important parameters in the spin-coating process, the quality of the disk is controlled and the closed-loop production control is finally achieved.