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介绍了薄膜集成电路陶瓷衬底的化学机械抛光技术,概述了化学机械抛光原理和设备,讨论分析了影响陶瓷衬底的化学机械抛光的因素,并用实验加以验证。
陶瓷衬底的化学机械抛光技术研究
【摘 要】
：
介绍了薄膜集成电路陶瓷衬底的化学机械抛光技术,概述了化学机械抛光原理和设备,讨论分析了影响陶瓷衬底的化学机械抛光的因素,并用实验加以验证。
【机 构】
：
中国电子科技集团公司第四十八研究所
【出 处】
：
电子工业专用设备
【发表日期】
：
2010年03期
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