本文叙述了软X射线出现电势谱以俄歇电子出现电势谱的各自特点和两者相互复合的必要性和实用性.介绍了本复合分析技术的基本组成,其中着重介绍了复合分析管的结构和特点,并以不锈钢材料和钡钨阴极作为典范,以检测的分析结果表示了本复合技术相辅相成、互为补充的重要优点. This paper describes the necessity and practicability of the appearance of the potential spectrum of the soft X-ray with the appearance of the Auger electron potential spectrum, and introduces the basic composition of the composite analysis technique, in which the structure of the composite analysis tube And characteristics of stainless steel and barium tungsten cathode as a model to test the results of the analysis showed that the composite technology complement each other and complement each other an important advantage.