扫描电子显微镜(简称扫描电镜)是近十余年朱迅速发展起来的一种大型精密电子光学仪器.它具有以下特点:(1)分辨本领高、景深长、成象富有立体感、试样制备简单;(2)和X光微区分忻仪、俄歇电子谱仪、电子能量损失谱仪、二次离子质谱仪以及通道电子衍射技术等相结合,可以在观察微区 Scanning electron microscope (referred to as scanning electron microscopy) is a large-scale precision electronic optical instrument developed rapidly in recent ten years.It has the following characteristics: (1) high resolving power, long depth of field, rich stereoscopic image, sample preparation Simple; (2) and X-ray micro-Xin instrument, Auger electron spectroscopy, electron energy loss spectrometer, secondary ion mass spectrometer and channel electron diffraction technology combined with the microscope can be observed