【摘 要】
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The structure of an electronegative plasma sheath in an oblique magnetic field is investigated with a fluid model. We assume the system consists of hot electron
【机 构】
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State Key Laboratory of Materials Modification by Laser,Ion and Electron Beams, Dalian University of
论文部分内容阅读
The structure of an electronegative plasma sheath in an oblique magnetic field is investigated with a fluid model. We assume the system consists of hot electrons and negative ions as well as cold positive ions. Densities of particles and distributions of the spacious potential in various states of magnetic field are studied. The result shows that the existence of magnetic field and negative ions has great effects on the plasma sheath structures. In addition, the effects of negative ion density and temperature on the structure of the electronegative plasma sheath are discussed.
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