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气体浓度或分压(如P_(co_2)或P_(NH_3)测量在工业中有着重要的用途。近年来,在医学和生理学领域,生物体内气体浓度测量之重要性也日趋显著。例如,已经承认,细胞内二氧化碳气体浓度的测量为生理学提供了重要的信息。在医学领域,血液中二氧化碳浓度的连续测量可监测病人在麻醉过程中、重病期间或痊愈过程中的状态。在这些过程中,血液二氧化碳含量的突然变化会出现一些严重后果。这类测量需要一个极小的二氧化碳传感器插入细胞内部或血管中进行。半导体敏感器件的迅速发展为这一用途的气敏电极的制作提供了便利。本文讨论了如何用ISFET制作小型气敏电极。
Measurement of gas concentration or partial pressure (such as P_ (co_2) or P_ (NH_3)) is of great use in industry, and in recent years there has been a significant increase in the importance of gas concentration measurements in living organisms in the fields of medicine and physiology, for example, , The measurement of intracellular concentrations of carbon dioxide gas provides important information in physiology.In the field of medicine, continuous measurement of the concentration of carbon dioxide in the blood can monitor the state of the patient during anesthesia, during a serious illness or during healing.In the process, blood There are some serious consequences of sudden changes in carbon dioxide, which require a tiny carbon dioxide sensor inserted into the interior of a cell or in a blood vessel. The rapid development of semiconductor-sensitive devices has facilitated the fabrication of gas sensing electrodes for this application. Discusses how to make a small gas sensor with ISFET.