一、问题的提出电阻率是硅单晶重要的电学参数之一,但是在电阻率测量中,尤其是高阻单晶,测度数据往往不稳定,其重复性也甚差,通常会超过10%以上。以上情况给生产和检验带来了不少困难。除了单晶材料不均匀这一原因外,从测试方法本身来看,也有造成测试 First, the issue raised Resistivity is one of the important electrical parameters of silicon single crystal, but in the resistivity measurement, especially high-resistance single crystal, the measurement data is often unstable, its repeatability is also poor, usually more than 10% the above. The above situation has brought a lot of difficulties to production and inspection. In addition to the single-crystal material for this reason, from the test method itself, but also caused the test