激光干涉技术通过将激光束进行偏振干涉,形成两束同频同幅、相位不同的光束,测量光束的相位随着主轴和压头的移动而发生变化,这也为压入深度和硬度的测量提供了可能。本文首先介绍了激光干涉技术进行硬度测量的原理,然后设计了采用偏振干涉仪的激光干涉装置,通过采用15.825nm的测量单位可以精确的获得压头雅图标准硬度块的深度,进而换算出硬度值,经过验证具有较小的不确定度。 Laser interferometry produces a polarization-dependent laser beam that forms two beams of the same amplitude and phase with the same frequency in the same frequency. The phase of the measuring beam changes with the movement of the spindle and the ram, which is also a measure of depth and hardness Provided possible. In this paper, the principle of laser interferometry for hardness measurement is introduced firstly. Then the laser interferometer with polarization interferometer is designed. By using 15.825nm measurement unit, the depth of the standard head can be accurately obtained, and the hardness Value, validated with less uncertainty.