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根据扩散硅压力传感器灵敏度温漂产生的原理，分析了灵敏度与温度的关系。并依据实验数据论述了灵敏系数和扩散表面杂质浓度的关系以及电阻温度系数与表面杂质浓度的关系。简单介绍通过调整和控制表面杂质浓度等参数，得到所需的灵敏度温度漂移曲线。
According to the principle of temperature drift of the sensitivity of diffusion silicon pressure sensor, the relationship between sensitivity and temperature is analyzed. Based on the experimental data, the relationship between the sensitivity coefficient and the impurity concentration of the diffusion surface and the relationship between the temperature coefficient of resistance and the surface impurity concentration are discussed. Brief introduction By adjusting and controlling the surface impurity concentration and other parameters, the required temperature drift curve of sensitivity.