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基于磁控溅射磁性薄膜存在铁磁性靶材难以正常溅射的问题,本文从改善靶材的制备工艺,提高靶材表面漏磁率出发,结合Co-Cr-Ta合金的差示扫描量热法曲线,采用不同的热处理制度对Co-Cr-Ta合金进行了热处理,并测定了不同热处理制度下Co-Cr-Ta合金的相结构、织构和靶材表面的漏磁率,发现热处理后,Co-Cr-Ta合金的主相由面心立方的Co相转变为密排六方的Co相,形成c轴趋于平行轧制面的{1 2 10}和{10 10}线织构,靶材表面的漏磁率增大5倍,并且漏磁率随热处理保温时间的延长而增大,得出了最佳热处理保温时间。Co-Cr-Ta合金经过热处理后,发生相变并形成{1 2 10}和{10 10}的线织构,是漏磁率增高的根本原因。
Based on the fact that the magnetron sputtering magnetic film has difficulty in normal sputtering of the ferromagnetic target, the preparation process of the target is improved and the magnetic flux leakage of the target is improved. In combination with the differential scanning calorimetry of the Co-Cr-Ta alloy Curve, the Co-Cr-Ta alloy was heat-treated with different heat treatment systems, and the phase structure, texture and magnetic flux leakage of the Co-Cr-Ta alloy under different heat treatments were measured. The main phase of the -Cr-Ta alloy is transformed from the face-centered cubic Co phase to the hexagonal close-packed Co phase to form a {1 2 10} and {10 10} line c-axis tending to be parallel to the rolling plane. The surface of the leakage rate increased by 5 times, and the magnetic flux leakage rate increases with the extension of heat treatment holding time, obtained the best heat treatment holding time. Co-Cr-Ta alloy after heat treatment, the phase transformation and the formation of {1 2 10} and {10 10} line texture, is the root cause of increased leakage rate.