新型SINP硅蓝紫光电池的研究

来源 :中国科学:技术科学 | 被引量 : 2次 | 上传用户：agsxuming

【摘要】

：

本研究中,采用以下主要步骤:先在p-型Si的绒面上,进行磷扩散形成同质p-n结,再低温热氧化生长超薄SiO2层,然后利用射频磁控溅射沉积ITO减反射/收集电极膜,成功制备了一种新型ITO/SiO2/np晶硅SINP结构蓝紫光电池.通过X-光衍射(XRD)、扫描电镜(SEM)、紫外-可见光透射谱(UV-VIS),以及霍尔效应(Halleffect)测量方法,表征了高质量ITO薄膜的微结构、光学与电学

【作者】

：

何波马忠权徐静赵磊张楠生李凤沈玲沈成周呈悦于征汕殷宴庭

【出处】

：

中国科学:技术科学

【发表日期】

：

2010年04期

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新型SINP硅蓝紫光电池的研究

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