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采用大直径中空柱状阴极磁控溅射装置和筒形加热器制备了高质量YBa2 Cu3O7-x双面超导薄膜。使用衬底为 (0 0 1)LaAlO3和 (0 0 1)YSZ。双面超导薄膜零电阻温度TC=89～ 91K ,临界电流密度JC≥ 10 6A/cm2 (77K ,零场下 ) ,微波表面电阻RS<1mΩ(77K ,10GHz)。对不同氧氩比下制备的双面膜进行了性能的比较。当O2 ∶Ar =1∶2 .5 ,衬底温度在80 0℃时 ,制备出了高质量的双面超导薄膜。同时对双面超导薄膜进行了微结构分析。用制备的 2 5mm× 2 0mm双面膜研制成功中频滤波器 ,中心频率为 1 0 6GHz时 ,插损为 0 6 7dB。
A high-quality YBa2 Cu3O7-x double-sided superconducting thin film was prepared by using a large-diameter hollow cylindrical cathode magnetron sputtering device and a cylindrical heater. The substrates used were (0 0 1) LaAlO3 and (0 0 1) YSZ. Double-sided superconducting film zero resistance temperature TC = 89 ~ 91K, the critical current density JC ≥ 10 6A / cm2 (77K, zero field), microwave surface resistance RS <1mΩ (77K, 10GHz). The performance of the double-coated films prepared at different oxygen-argon ratios was compared. When O2: Ar = 1: 2.5, the substrate temperature was 80 ℃, a high quality double-sided superconducting thin film was prepared. At the same time, the microstructure of double-sided superconducting thin films was analyzed. With the preparation of 2 5mm × 20mm double-sided film successfully developed IF filter, the center frequency of 106GHz, the insertion loss of 0 6 7dB.