The temperature field, velocity field, as well as species distribution in three-dimensional space are successfully calculated by establishing three-dimensional geometry model and solving plasma jet-substrate interaction equations, optimized particle trajecory models, as well as particle-particle heat transfer equations in three-dimensionalal space. Under typical working conditions, the flying trajectories and distribution of ZrO2 ceramic particles and Ni metal particles are also simulated. Results show that, the plasma jet becomes wider near the substrate, and the stochastic trajectory model is preferable to simulate the turbulent diffusion effect of particles. In addition, Ni metal particles penetrate relatively more deeply than ZrO2 ceramic particles due to larger density.