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为了克服石英玻璃和Pyrex 7740玻璃制作微流管道价格昂贵、工艺流程复杂等缺点,利用普通钠钙玻璃为基质、正光刻胶AZ4620为掩膜牺牲层,提出了一种高效、快速、低成本的微流管道制作方法。该方法优化了腐蚀工艺的关键参数,解决了光刻胶与玻璃的粘附性、光刻胶在腐蚀液中的耐受时间等问题。试验腐蚀深度达到80μm,最小特征尺寸小于50μm,微流管道侧壁陡直度小于100°,底部平整度误差小于±1.5μm,制作周期仅需4h左右。
In order to overcome the shortcomings of the microfluidic tubes made of quartz glass and Pyrex 7740 glass being expensive and complicated in process flow, an ordinary soda-lime glass substrate and a positive photoresist AZ4620 are used as a mask sacrificial layer, an efficient, rapid and low-cost Microfluidic pipe making method. The method optimizes the key parameters of the etching process, solves the problems of the adhesion between the photoresist and the glass, and the resist time of the photoresist in the etching solution. The corrosion depth of the test reaches 80μm, the minimum feature size is less than 50μm, the steepness of the side wall of the microfluidic pipe is less than 100 °, the error of the flatness of the bottom is less than ± 1.5μm, and the fabrication period is only about 4h.