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高质量大面积ＹＢＣＯ簿膜是用原位中空柱状阴极直流磁控溅射装置制备的。化学计量比的超导靶的内在为１００ｍｍ，加热器有效面积５０×４０ｍｍ￣２。在３０×３０ｍｍ￣２的Ｚｒ（Ｙ）Ｏ＿２ＬａＡｌＯ＿３基片上沉积的ＹＢＣＯ薄膜的厚度均匀度为±６％，临界温度Ｔ＿ｃ＞８９Ｋ，Ｔ＿ｃ不均匀性在１％以内，△Ｔｃ在０．８～０．９之间，临界电流密度Ｊ＿ｃ为２０～３．５×１０￣６Ａ／ｃｍ￣２；△Ｊ＿ｃ为１．０～１．５Ａ／ｃｍ￣２。微波表面电阻在７７．５Ｋ、９８９４ＭＨｚ下，测得Ｒｓ在０．２５～０．７６ｍΩ。以上参数表明该ＹＢＣＯ超导薄膜可在无源微波器件领域应用。ＹＢＣＯ超导薄膜沿Ｃ轴生长时的临界电梳密度Ｊ＿ｃ比沿ａ轴和ｂ轴生长时的临界电流密度Ｊ＿ｃ大两个数量级，微波表面电阻可差一个数量级。所制备的ＹＢＣＯ薄膜样品经Ｘ射线衍射分析表明，是纯Ｃ轴垂直于基体表面的外延薄膜。ＳＥＭ电子沟道和ＴＥＭ截面电子衍射结果表明，在Ｚｒ（Ｙ）Ｏ＿２和ＬａＡＩＯ＿３基体上沉积的薄膜为单晶结构。用该薄膜做出了性能良好ＹＢＣＯ超导带状线谐振器，其Ｑ＿０（无载品质因素）值达到１３１００。做出的环形微带谐振器，直线式微带谐振器，超导天线均性能良好，已可作为单独?
High-quality large-area YBCO film is prepared by in situ hollow cylindrical DC magnetron sputtering. The stoichiometric ratio of the superconducting target is 100mm, and the effective heater area is 50 × 40mm ~ 2. The thickness uniformity of YBCO films deposited on 30 × 30mm ~ 2 Zr (Y) O_2LaAlO_3 substrate is ± 6%, the critical temperature T_c> 89K, the T_c nonuniformity is within 1%, the △ Tc is 0.8 ~ 0 .9, the critical current density J_c is 20 ~ 3.5 × 10 ~ 6A / cm ~ 2; △ J_c is 1.0 ~ 1.5A / cm ~ 2. Microwave surface resistance at 77.5K, 9894MHz measured Rs 0.25 ~ 0.76mΩ. The above parameters show that the YBCO superconducting thin film can be applied in the field of passive microwave devices. The critical electric comb density J_c of YBCO superconducting films grown along the C axis is two orders of magnitude larger than the critical current density J_c along the a axis and the b axis, and the microwave surface resistance can be an order of magnitude worse. The prepared YBCO film samples by X-ray diffraction analysis showed that the pure C-axis epitaxial film perpendicular to the substrate surface. SEM electron channel and TEM cross-sectional electron diffraction results show that the films deposited on Zr (Y) O_2 and LaAIO_3 substrates have a single crystal structure. The YBCO superconducting stripline resonator with good performance has been made with this thin film, and its Q_0 (no-load quality factor) value reaches 13,100. Made of circular microstrip resonators, linear microstrip resonators, superconducting antennas are good performance, can be used as a separate?