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提出了在分子流状态下用蒙特卡罗法计算涡轮分子泵叶列传输几率的二维数学模型及其电算程序框图,为涡轮分子泵的优化设计提供有利条件。
A two-dimensional mathematical model for calculating the transmission probability of turbo-molecular pump blades by using Monte-Carlo method under the condition of molecular flow is proposed. The calculation program provides the block diagram for the optimal design of turbo pump.