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面向光印刷互连背板的应用需求,提出基于准分子激光消融原理对光波导的刻蚀技术进行研究,在背板上任意位置获得光波导端面实现光耦合。采用193 nm波长的准分子激光作为光源,通过方形掩模孔径投影在互连背板光波导上,研究了激光能量、激光脉冲次数与刻蚀深度、端面粗糙度等参量之间关系,通过刻蚀参数的优化,刻蚀后端面光耦合损耗增加量约1.3 d B。
In view of the application requirements of the optical printed interconnect backplane, the etching technology of the optical waveguide is proposed based on the principle of excimer laser ablation, and the optical waveguide end face is optically coupled at any position on the backplane. The 193 nm wavelength excimer laser is used as the light source, and the aperture of the interconnected backplane optical waveguide is projected through a square mask aperture. The relationship between the laser energy, the number of laser pulses and the etching depth and the surface roughness is studied. Erosion parameter optimization, the end face of the optical coupling loss increase of about 1.3 d B.