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The principle of surface wave plasma discharge in a rectangular cavity is introduced and the distribution of the electromagnetic field within a rectangular waveguide is analysed.A novel structure of a slot antenna array is presented.In comparison with the traditional slot- antenna,it is shown that the designed slot antenna array can excite effectively the surface wave coupling into the chamber,and generate a stable large-area high-density plasma.These results are useful for exploring the optimized design of the slot-antenna for surface wave plasmas.
The principle of surface wave plasma discharge in a rectangular cavity is introduced and the distribution of the electromagnetic field within a rectangular waveguide is analyzed. A novel structure of a slot antenna array is presented. In contrast with the traditional slot-antenna, it is shown that the designed slot antenna array can excite effectively the surface wave coupling into the chamber, and generate a stable large-area high-density plasma. These results are useful for exploring the optimized design of the slot-antenna for surface wave plasmas.