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以光开关为主介绍了几种典型的用于光通信的微电子机械系统光器件的研究现状,并介绍了微电子机械系统技术进展。基于微电子机械系统技术,可以获得多种光通信器件。与传统器件相比,微电子机械系统光器件具有体积小、响应速度快、集成度高、成本低等优点,将在光通信领域发挥重要作用
The research status of several typical optoelectronic devices used in optical communication is introduced based on the optical switch, and the progress of the technology of the microelectromechanical system is introduced. Based on microelectromechanical system technology, can obtain a variety of optical communication devices. Compared with traditional devices, MEMS devices have the advantages of small size, fast response, high integration and low cost, and will play an important role in the field of optical communications