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为了检测环境中恶臭气体的体积分数并且有效减小气相色谱装置的体积,利用MEMS加工工艺,制造了一款芯片式色谱柱。在此基础上设计了1套用于恶臭气体分析的系统,可以有效地实现恶臭气体的分离与检测。对系统的线性度进行了研究,并以异丁烯气体为例,通过多次重复性实验,得到整个系统的线性度,其相关系数为0.998 0,误差平方和为72.95。此外,还与现有的商品化气相色谱仪进行对比,其性能优于现有仪器的标准。
In order to detect the volume fraction of odorous gases in the environment and to effectively reduce the volume of the gas chromatograph, a chip-type chromatography column was fabricated using MEMS processing. Based on this, a set of system for malodorous gas analysis was designed, which can effectively separate and detect the malodorous gas. The linearity of the system was studied. Taking the isobutylene gas as an example, the linearity of the whole system was obtained through repeated experiments. The correlation coefficient was 0.998 0, and the sum of squared errors was 72.95. In addition, compared with the existing commercial gas chromatograph, its performance is superior to the standard of the existing instruments.