翻开20世纪的战争史,航空母舰、坦克和战斗机等大型武器装备跃然纸上。然而,在即将到来的21世纪,这些曾经辉煌一时的“巨兽”却将被新兴的“小鬼”取而代之。这就是微机电系统的兴起及其在武器装备领域掀起的一场“袖珍化革命”。所谓微机电系统,是指外形尺寸在毫米以下,构成元件尺寸在微米一纳米(10~(-6)-10~(-9))量级的可控制、可 Opened the 20th century war history, aircraft carriers, tanks and fighter jets and other large weapons and equipment on the vivid paper. However, in the upcoming 21st century, these once glorious “behemoths” will be replaced by the new “kid”. This is the rise of MEMS and its “miniaturization revolution” in the field of weapons and equipment. The so-called micro-electromechanical systems, refers to the dimensions below the millimeter, the size of the components in the micron-nanometer (10 -6 -10 -9)