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从磷酸盐激光玻璃的成分和结构出发,分析了其化学机械抛光(CMP)机制.通过实验验证了磷酸盐激光玻璃对抛光液pH值具有较强的选择性,在微酸性和中性条件下磷酸盐激光玻璃具有较高的抛光效率,在抛光液中添加pH值调节添加剂会保持抛光环境的酸碱性从而影响抛光效率和抛光质量.通过对pH值和抛光剂浓度的控制获得了均方根(RMS)优于0.6 nm的磷酸盐激光玻璃的超光滑表面.
The chemical mechanical polishing (CMP) mechanism of phosphate laser glass was analyzed based on the composition and structure of phosphate laser glass. The experimental results show that phosphate laser glass has strong selectivity to pH value of polishing solution. Under slightly acidic and neutral conditions Phosphate laser glass with high polishing efficiency, adding a pH adjusting additive in the polishing liquid will maintain the acid-base environment of the polishing environment and thus affect the polishing efficiency and the polishing quality.By controlling the pH and polishing agent concentration, the mean square Root (RMS) is superior to the ultra-smooth surface of phosphate laser glass at 0.6 nm.