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本文通过利用射频磁控溅射方法，选择和控制沉积薄膜工艺参数，在石英（ｑｕａｒｔｚ）和高定向热解石墨（ＨＯＰＧ）上制备出纳米尺度的银膜。利用扫描隧道显微镜（ＳＴＭ）对银膜的表面形貌和分布观察分析可得，纳米银颗粒的直径在３ｎｍ到２０ｎｍ之间。经过紫外－可见－近红外透射光谱（ＵＶ－ＶＩＳ－ＮＩＲ）测量证明：当纳米银颗粒的粒径在此范围内时，银膜的光学特征吸收峰的位置随着粒径的增大“红移”不大，但其半峰宽却随粒径的增大而增大。
In this paper, nanoscale silver films were prepared on quartz and highly oriented pyrolytic graphite (HOPG) by using RF magnetron sputtering method to select and control the deposition film parameters. By scanning tunneling microscope (STM) on the silver film surface morphology and distribution observed and found that the diameter of nano-silver particles between 3nm to 20nm. The results of UV-VIS-NIR measurement show that when the particle size of the nano-silver particles is in this range, the optical absorption peaks of the silver film increase as the particle size increases Shift "is not big, but its half-width but with the increase of particle size increases.