Gettering of copper impurity in silicon by aluminum precipitates and cavities

来源 :核技术：英文版 | 被引量 : 0次 | 上传用户：ytm_2009

【摘要】

：

Al precipitates as well as cavities (or open-volume detects) are known for their ability to getter impuri-ties within Si. In order to compare their relative get

【作者】

：

WUYan-Jun ZHANGMiao ZHANGNing-

【机构】

：

StateKeyLaboratoryofFunctionalMaterialsforlnformatics

【出处】

：

核技术：英文版

【发表日期】

：

2003年3期

【关键词】

：

铜硅片铝过渡金属元素 Gettering Ion implantation Cavities Al precipitates

【基金项目】

：

国家自然科学基金，上海市青年基金

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Al precipitates as well as cavities (or open-volume detects) are known for their ability to getter impuri-ties within Si. In order to compare their relative gettering strength we produced both Al precipitates and cavities atdifferent depths within one Si

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Gettering of copper impurity in silicon by aluminum precipitates and cavities

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