利用两种不同方法完成力平衡加速度计的系统级仿真.系统级模型参数在已完成的硅基力平衡MEMS加速度计结构上提取,数学模型和仿真分别采用VHDL-AMS和SIMULINK TM来实现.对仿真结果进行比较,两者之间有细微的差别.利用VHDL-AMS进行仿真更灵活、准确,模型可重复再用,但是过程中要消耗更多时间.而使用SI MULINK可以方便、快捷地建立模型. The system-level simulation of the force balance accelerometer is completed by two different methods.The system-level model parameters are extracted from the completed silicon-based force-balanced MEMS accelerometer structure, and the mathematical model and simulation are respectively implemented by VHDL-AMS and SIMULINK TM. Simulation results are compared, there are subtle differences between the two.Using VHDL-AMS simulation is more flexible and accurate, the model can be reused, but the process consumes more time.Using SI MULINK can be easily and quickly established model.